Products & Service
EUVL or Blue-X Light Sources
We provide industry leading EUVL light sources to optimize semiconductor lithography processes.
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EUVL Materials and Components
We enhance the efficiency and quality of semiconductor manufacturing through next-generation EUVL materials and components
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Evaluation Equipment Utilizing EUVL or Blue-X Light Source
We provide EUVL pellicle transmittance, nanopatterning evaluation equipment, and analysis services for EUVL optical components and materials. ● EUVL pellicle transmittance measurement equipment ● EUVL mask reflectivity measurement equipment ● Hydrogen, high-temperature, and lifetime evaluation of EUVL optical components and materials etc.
UHV Vacuum components
EUV light source technology necessitates an Ultra-High Vacuum (UHV) environment. Leveraging our expertise, we design, manufacture, and supply UHV components, providing comprehensive professional support for entire vacuum systems
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